ArF (193 nm) and KrF (248 nm) excimer lasers are well-established deep-UV sources. However, excimer lasers generate nanosecond pulses and typically operate with multimode beam profiles, resulting in lower beam quality and significantly poorer focusing performance than single-transverse-mode solid-state lasers. The larger focal spot limits the achievable energy density and minimum feature size.
Excimer systems are also bulky gas lasers requiring high-voltage power supplies, circulating laser gases and regular maintenance. Their gas mixtures contain halogens, increasing system complexity and operating costs.
Why Passat is different
- Compact all-solid-state platform. Unlike excimer lasers, Passat systems do not require circulating laser gases, halogen mixtures, high-voltage gas-discharge hardware or complex gas handling, making the system significantly more compact, safer and easier to maintain.
- Picosecond pulse duration. Excimer lasers generate nanosecond pulses, whereas Passat lasers operate in the picosecond regime. This provides much higher peak intensity even at moderate pulse energy, enabling efficient material removal with substantially lower thermal loading.
- Single-transverse-mode beam quality. Passat lasers deliver a diffraction-limited beam that can be focused to a much smaller spot than the typically multimode excimer beam. The resulting higher energy density enables finer feature sizes, better dimensional accuracy and improved machining precision.
- Lower thermal impact. The combination of ultrashort pulses, superior beam quality and higher peak intensity minimizes melting, recast layers, microcracking and the heat-affected zone during deep-UV micromachining.